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Carbon Nano Tube-Based Sensor Design for NEMS/MEMS Applications

Carbon Nano Tube-Based Sensor Design for NEMS/MEMS Applications
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Author(s): Rekha Devi (Chandigarh University Mohali, I. K. Gujral Punjab Technical University, Jalandhar, India) and Sandeep Singh Gill (National Institute of Teachers Training and Research, Chandigarh, India)
Copyright: 2020
Pages: 17
Source title: Major Applications of Carbon Nanotube Field-Effect Transistors (CNTFET)
Source Author(s)/Editor(s): Balwinder Raj (National Institute of Technical Teachers Training and Research, Chandigarh, India), Mamta Khosla (Dr. B. R. Ambedkar National Institute of Technology, Jalandhar, India) and Amandeep Singh (National Institute of Technology, Srinagar, India)
DOI: 10.4018/978-1-7998-1393-4.ch003

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Abstract

This chapter deals with designing CNT-based piezoresistive pressure sensors with different boss sizes and with different configurations designed for low pressure range. The purpose for this work is to show a NEMS-based pressure sensor, which was analyzed by using ANSYS 17 software. The different combination of the diaphragm shows the improved performance of the pressure sensor in the case of CNT as compare to the silicon. This chapter is organized in sections, where section 2 discusses the review of CNT based MEMS/NEM design process and applications, Section 3 elaborates the use of CNT materials for design piezoresistive pressure sensors, Section 4 discusses mathematical modeling and simulation of CNT-based piezoresistive pressure sensors, Section 5 examines the results and discussion in terms of linearity and sensitivity of designed sensor, and Section 6 consummates the chapter with the conclusion.

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